Exhaust gas treatment unit
Filtration accuracy 0.3um (95%)
The "exhaust gas treatment unit" is the optimal solution for addressing exhaust gas issues arising in semiconductor processes. Our exhaust gas treatment unit efficiently processes harmful gases generated from semiconductor manufacturing equipment such as VCD and etching devices, reducing the load on dry vacuum pumps. As a result, it achieves reduced maintenance frequency and cost savings, contributing to stable equipment operation and improved production efficiency.
- Company:アルクトス精密
- Price:Other